Robot for the Transfer of Semiconductor Wafers
All axes are driven by brush-less servo motors with encoders in closed loop operation. XY system employs high lead precision ground ball screws for high speed operation. Lift stage LSZW is a precision motorized stage with unique wedge design for exceptional sub-micron resolution and precision of operation.
Direct drive rotary stage PSR-150 features arc-sec precision and 300 rpm rotational speed. There is a large center aperture in the rotary stage for the channel to pass user vacuum and electrical lines. Designed for Clean Room Class 10 compatibility to transfer semiconductor wafers, gantry features sealed structure with high durability stainless steel strips, electro-less plating for corrosion resistance and vacuum suction ports to exhaust particles generated by the moving parts.
This gantry can also be supplied in cost effective version for general automation applications with larger strokes in custom configurations.
For OEM applications, IntelLiDrives can integrated four axes gantry with EtherCAT and CANopen networks and digital servo amplifiers operating in the following control modes: RS-232 ASCII; ±10V position/velocity/torque; PWM velocity/torque; master encoder for gearing and camming; digital input commands to initiate predetermined motion sequences.
Distributed control network for EtherCAT & CANopen makes system commissioning fast and simple. All network management is accomplished with a few simple commands linked into your application program. Distributed clocks enable the tighest synchronization of multi-axis systems. Drive configuration software is powerful and easy-to-use. Comprehensive diagnostics, auto-tuning and advanced oscilloscope tools simplify system commissioning.
Digital servo drives are designed for high-speed automation systems in semiconductor fabrication, industrial assembly, materials handling, test and measurement, laboratory automation and high performance general industrial installations.
-XY stroke 750 x 250 mm
-Z (Lift) stroke 12 mm
-Rotation 360 deg
-Accuracy 5 microns
For additional information, contact IntelLiDrives.